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Development of a novel humidity sensor with error-compensated measurement system
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Development of a novel humidity sensor with error-compensated measurement system
Arshak, Khalil; Twomey, K; Heffernan, Donal
Date:
2002
Publication:
Microelectronics, 2002. MIEL 2002. 23rd International Conference;1, pp. 215-218
Publication type:
Conference Object
Abstract:
This paper documents the creation of a
complete PC-Based humidity sensing system, implemented
using LabVIEW from National Instruments. The humidity
sensor, which has a measured sensitivity of 0.25%/RH%, is
manufactured by thin film technology from a novel
combination of SiO/In2O3. Both the humidity sensor and a
standard temperature sensor are interfaced to a PC using a
front-end signal conditioning circuit. The entire system has
been analyzed mathematically and the necessary algorithms
for error-compensation have been developed. The resulting
measurement system is efficient, accurate and flexible.
Description:
peer-reviewed
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