University of Limerick Institutional Repository

Browsing Electronic & Computer Engineering by Subject "ion beam lithography"

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Browsing Electronic & Computer Engineering by Subject "ion beam lithography"

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  • Arshak, Khalil; Mihov, Miroslav; Arshak, Arousian; McDonagh, Declan; Sutton, D (IEEE Computer Society, 2004)
    Focused Ion Beam (FIB) lithography has significant advantages over the electron beam counterpart in terms of resist sensitivity, backscattering and proximity effects. Applying the Top Surface Imaging (TSI) principal to ...

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