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Development of a room temperature thin film In203, ZnO and SnO2 ozone sensor

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dc.contributor.author Arshak, Khalil
dc.contributor.author Hickey, Ger
dc.contributor.author Forde, Edward
dc.contributor.author Harris, John A.
dc.date.accessioned 2011-07-01T16:10:00Z
dc.date.available 2011-07-01T16:10:00Z
dc.date.issued 2007
dc.identifier.uri http://hdl.handle.net/10344/1072
dc.description peer-reviewed
dc.description.abstract Thin films of Indium-zinc-tin oxide have been prepared by Vacuum Thermal Evaporation (VTE). The sensing characteristics of these films to environmentally relevant ozone concentrations were studied at room temperature. The effects of film thickness, deposition rate and annealing were investigated. The resistance of the thin film was found to be inversely proportional to the deposition rate. The highest sensitivity of the ozone sensors was found at a deposition rate of 1.2 nm/s - 1.4 nm/s. In addition the 03 sensors were found to perform best with a 40 nm thick sensing layer. In203, ZnO and SnO2 were deposited on alumina substrates containing interdigitated electrodes by means of VTE. These results have shown that ln203:ZnO:SnO2 thin films prepared by VTE method are promising for room temperature ozone sensing. en_US
dc.language.iso eng en_US
dc.publisher IEEE Computer Society en_US
dc.relation.ispartofseries ISIE 2007 International Symposium;
dc.rights ©2008 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other users, including reprinting/ republishing this material for advertising or promotional purposes, creating new collective works for resale or redistribution to servers or lists, or reuse of any copyrighted components of this work in other works. en_US
dc.subject thin film en_US
dc.subject ozone sensor en_US
dc.title Development of a room temperature thin film In203, ZnO and SnO2 ozone sensor en_US
dc.type Conference item en_US
dc.type.supercollection all_ul_research en_US
dc.type.supercollection ul_published_reviewed en_US
dc.type.restriction none en


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