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Date Issued: 1900 - 1999
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Date Issued: 1995
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Search Results for Community: Faculty of Science and Engineering
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Modelling of resolution enhancement processes in lithography
Arshak, Arousian
;
Arshak, Khalil
;
McDonagh, Declan
;
Mathur, B.P.
(
IEEE Computer Society
,
1995
)
This paper describes the modelling and simulation of two resolution enhancement techniques in lithography ; 1) phase shift mask (PSM) technology and 2) top surface imaging (TSI) with silylation and dry ...
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Author
Arshak, Arousian (1)
Arshak, Khalil (1)
Mathur, B.P. (1)
McDonagh, Declan (1)
Subject
lithography (1)
phase shift mask technology (1)
top surface imaging (1)
Date Issued
1995 (1)