University of Limerick Institutional Repository

Browsing Faculty of Science and Engineering by Subject "nanolighography"

DSpace/Manakin Repository

Browsing Faculty of Science and Engineering by Subject "nanolighography"

Sort by: Order: Results:

  • Arshak, Khalil; Mihov, Miroslav; Arshak, Arousian; McDonagh, Declan; Sutton, D (IEEE Computer Society, 2004)
    Focused Ion Beam (FIB) lithography has significant advantages over the electron beam counterpart in terms of resist sensitivity, backscattering and proximity effects. Applying the Top Surface Imaging (TSI) principal to ...

Search DSpace


Advanced Search

Browse

My Account