University of Limerick Institutional Repository

Browsing Electronic & Computer Engineering by Author "Mathur, B.P."

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Browsing Electronic & Computer Engineering by Author "Mathur, B.P."

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  • Arshak, Arousian; Arshak, Khalil; McDonagh, Declan; Mathur, B.P. (IEEE Computer Society, 1995)
    This paper describes the modelling and simulation of two resolution enhancement techniques in lithography ; 1) phase shift mask (PSM) technology and 2) top surface imaging (TSI) with silylation and dry ...

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