University of Limerick Institutional Repository

Browsing by Subject "nanolighography"

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Browsing by Subject "nanolighography"

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  • Arshak, Khalil; Mihov, Miroslav; Arshak, Arousian; McDonagh, Declan; Sutton, D (IEEE Computer Society, 2004)
    Focused Ion Beam (FIB) lithography has significant advantages over the electron beam counterpart in terms of resist sensitivity, backscattering and proximity effects. Applying the Top Surface Imaging (TSI) principal to ...

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